Deep Implants: Fundamentals and Applications

Deep Implants: Fundamentals and Applications

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Deep implants are produced by the high-energy implantation of impurities in a host material. The thus created subsurface layers have properties that are different from the very surface and the bulk and show great promise for application in the electronics industry.Figure 1 is a schematic diagram of the CAPRICE ECRIS. The operation with gases is simple and, to increase the currents of the higher charge states of a heavy gas, it is mixed with a light gas. Figure 2 shows the currents measured at constantanbsp;...

Title:Deep Implants: Fundamentals and Applications
Author: G.G. Bentini, A. Golanski, S. Kalbitzer
Publisher:Elsevier - 1989-01-01

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